Optics used for photolithography requires the environmental durability against high temperature and high efficiency in transmission and reflection to contribute a production yield.
Asahi provides bandpass filters for mercury emission lines, longpass filters, or cold mirrors coated by ion assisted deposition (IAD) method. IAD technology assures the durability of interference film against an inhospitable environment in a photolithography apparatus such as stepper. It also achieves the stable spectral performance and high transmission or reflection.
Large format optics is available as well, ∼ 600mm diameter.
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